diff --git a/drivers/gpu/drm/xe/regs/xe_gt_regs.h b/drivers/gpu/drm/xe/regs/xe_gt_regs.h
index 4ebaa0888a43..9c88ca3ce768 100644
--- a/drivers/gpu/drm/xe/regs/xe_gt_regs.h
+++ b/drivers/gpu/drm/xe/regs/xe_gt_regs.h
@@ -583,7 +583,7 @@
 #define   DISABLE_128B_EVICTION_COMMAND_UDW	REG_BIT(36 - 32)
 #define   LSCFE_SAME_ADDRESS_ATOMICS_COALESCING_DISABLE	REG_BIT(35 - 32)
 
-#define ROW_CHICKEN5				XE_REG_MCR(0xe7f0)
+#define ROW_CHICKEN5				XE_REG_MCR(0xe7f0, XE_REG_OPTION_MASKED)
 #define   CPSS_AWARE_DIS			REG_BIT(3)
 
 #define SARB_CHICKEN1				XE_REG_MCR(0xe90c)